Micro pressure controller

- This allows for meniscus and purge control with high pressure uniformity


* SPECIFICATION 

- D x W x H : 75 x 186 x 174 (mm)

- Weight : 1.5 (kg)

- Pressure Range :

Positive - 0 ~ 50kPa

Negative - 0 ~ -10kPa

- Communication : EtherCAT

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